ISO/TS TECHNICAL SPECIFICATION 25138 Secondedition 2019-08 Surface chemical analysis Analysis of metal oxide films by glow-discharge optical-emission spectrometry Analyse chimique des surfaces - Analyse de films d'oxyde de métal par spectrométrie d'émission optique a décharge luminescente Reference number IS0/TS 25138:2019(E) @ IS0 2019 IS0/TS 25138:2019(E) COPYRIGHTPROTECTEDDOCUMENT @ IS0 2019 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either IsO at the address below or Iso's member body in the country of the requester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +41 22 749 01 11 Fax: +41 22 749 09 47 Email: [email protected] Website: www.iso.org Published in Switzerland ii @ IS0 2019 - All rights reserved