ISO/TS TECHNICAL SPECIFICATION 80004-8 Secondedition 2020-11 Nanotechnologies Vocabulary - Part 8: Nanomanufacturing processes Nanotechnologies Vocabulaire - Partie 8: Processus de nanofabrication Reference number IEC IS0/TS 80004-8:2020(E) oS1 @ISO2020 IS0/TS 80004-8:2020(E) COPYRIGHT PROTECTED DOCUMENT IS02020 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either IsO at the address below orIso'smemberbody inthecountry oftherequester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +4122 749 0111 Email: [email protected] Website: www.iso.org Published in Switzerland ii @ IS0 2020 - All rights reserved