ISO INTERNATIONAL STANDARD 13084 Second edition 2018-11 Surface chemical analysis Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer Analyse chimiquedessurfacesSpectrométriedemassedes ions secondaires-Etalonnagede I'echelle de masse pourun spectrometre demasse des ions secondaires a temps de vol Reference number IS0 13084:2018(E) ISO @IS02018 IS013084:2018(E) COPYRIGHTPROTECTEDDOCUMENT IS02018 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either IsO at the address below or IsO's member body in the country of the requester: ISO copyright office CP 40i : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +4122.749 0111 Fax: +41 22 749 09 47 Email:[email protected] Website: www.iso.org Published in Switzerland ii IS02018-Allrights reserved IS013084:2018(E) Contents Page Foreword iv Introduction V 1 Scope. .1 2 Normativereferences .1 3 Terms and definitions 1 4 Symbols andabbreviated terms. 4.1 Symbols 1 4.2 Abbreviated terms 2 5 Outline of method 2 6 Method for improving mass accuracy .3 6.1 Obtaining the reference sampleforoptimization 3 6.2 Preparationofpolycarbonatesample 4 6.3 ObtainingtheSIMS spectraldata 4 6.4 Calculating mass accuracy 5 6.5 Optimizing instrumental parameters. 7 6.6 Calibration procedure. 9 Annex A (informative) Calibration uncertainty .11 Annex B (informative) Internal addition method .13 Bibliography .15 @ IS0 2018 - All rights reserved iii